Multi-Junction Pixel Image Sensor with Dielectric Reflector Between Photodetection Layers

ABSTRACT

Some embodiments provide a color image sensor and color image sampling method that uses multiple-layer pixels and is capable of producing color images without using absorption color filters (e.g., such as employed in conventional CFAs). In accordance with some embodiments of the color image sensor device and color image sampling method, frequency-dependent reflectors are incorporated between the photodetection layers of multiple-layer (e.g., two layer) pixels.

RELATED APPLICATIONS

This application is a continuation of application Ser. No. 15/545,958,which is a national stage application under 35 U.S.C. § 371 ofInternational Application No. PCT/US2016/014784, filed Jan. 25, 2016,which claims the benefit of U.S. Provisional Application No. 62/107,312,filed Jan. 23, 2015, each of which is hereby incorporated herein byreference in its entirety.

BACKGROUND

The present disclosure relates generally to apparatus and methods forimage sensing, and, more particularly, to a color image sensorcomprising pixels having multiple photodetection layers for reproducingcolor without the need for conventional absorption color filter arrays.

CMOS image sensors have seen tremendous improvement in performance,especially under optimal illumination conditions. But, for low lightapplications, there is still much room left for improvement, despite theemergence of technologies such as backside illumination and panchromaticfilters. Sensors operating in light-starved conditions typically usemonochrome sensors since they collect more photons. These sensors arealso able to incorporate near-infrared to further increase the collectedsignal. The lack of color however makes object detection andidentification extremely difficult.

The use of absorption color filters is a major limiting factor to acolor image sensor's low light performance. Primary color filter arraystypically transmit only about a third of the incident light, whilecomplementary filter arrays tend to have a theoretical maximumtransmittance of about two thirds of the incident light.

To make the most use of incident illumination, three pixel layers can bestacked vertically to sample different colors without the need for anabsorption color filter as demonstrated by Foveon (see, e.g., U.S. Pat.No. 5,965,875 to Merrill). This is possible because light absorption insilicon is wavelength dependent. The increased complexity associatedwith implementing readout circuitry for each of the three junctions haslimited the growth of this technology. Other challenges such asincreased noise, lag and reduced fill factor have hampered the use ofthis concept for low light imaging.

A compromise which has been explored quite extensively is to stack twopixel layers to reduce the readout complexity and still leverage thewavelength dependent absorption for color sampling. Each pixel outputstwo color samples which is insufficient for full color reproduction.Several implementations of two-layer pixels therefore tend to use acolor filter array (CFA) to vary the response of pixels in order togenerate three or more color samples. See K. M. Findlater, “Burieddouble junction pixel using green and magenta filters,” in IEEE Workshopon CCDs and Advanced Image Sensors, Japan, 1999; D. J. Tweet, J. J. Lee,J. M. Speigle and D. Tamburino, “2PFC image sensors: better imagequality at lower cost,” in IS&T/SPIE Electronic Imaging: DigitalPhotography V, 7250, 2009; see, also, U.S. Pat. No. 8,106,426 to Tweet,et al. It has been suggested that the use of Green and Magenta checkeredfilter pattern over the two layer pixels is optimum for both good colorreproduction and high SNR (E. R. Fossum, “Investigation of Two-LayerPhotodetectors for YSNR10 Improvement in Submicron Pixels,” inInternational Image Sensor Workshop, Hokkaido, Japan, 2011. The use ofcolor filters however reduces the light collected by the pixels. Inorder to maximize the light absorption to make these two-layer pixelsuseful for low light applications, an alternative color sampling methodand device is required which eliminates the losses caused by absorptioncolor filters.

SUMMARY OF SOME EMBODIMENTS

Some embodiments of the present disclosure provide a color image sensordevice and color image sampling method that uses multiple-layer pixelsand is capable of producing color images without using absorption colorfilters (e.g., such as employed in conventional CFAs). In accordancewith some embodiments of the color image sensor device and color imagesampling method, instead of using absorption color filter arrays as theprimary means of varying the spectral responses of the photodetectionlayers, frequency-dependent reflectors are incorporated between thephotodetection layers of multiple-layer (e.g., two layer) pixels. Byselectively reflecting a portion of the visible light spectrum, eachfrequency-dependent reflector (FDR) alters the color response of theneighboring photodetection layers between which the frequency-dependentreflector is disposed along the direction of photon illumination of theimage sensor. The frequency-dependent reflectors (FDRs) may beimplemented as a distributed Bragg reflectors (DBRs).

For example, in accordance with some embodiments, the image sensorcomprises a two-layer pixel that includes a frequency-dependentreflector disposed between top/upper and bottom/lower photodetectionlayers having respective top/upper and bottom/lower junctions (e.g.,photodiode junctions), and wherein the frequency-dependent reflector isconfigured such that a selective spectral portion of light that isincident thereon through the top/upper photodetection layer issubstantially reflected by the frequency-dependent reflector into thetop/upper photodetection layer, and the light incident thereon throughthe top/upper photodetection layer that is not reflected by thefrequency-dependent reflector is substantially transmitted to thebottom/lower photodetection layer.

In accordance with some embodiments of the present invention, an imagesensor comprises an array of repeating pixel kernels such that eachkernel includes two or more multi-junction (e.g., two-junction) pixels.The pixels in the kernel are designed such that at least one pixel inthe kernel has a frequency-dependent reflector (FDR) such as adistributed Bragg reflector (DBR) so the pixels in a kernel producethree or more color samples.

By way of non-limiting example, the image sensor may be, for example, aconventional CMOS image sensor (e.g., configured to operate in chargeintegration mode, with a single integration period per pixel per frame),a digital integration sensor (DIS), a quantized DIS (qDIS), or a QuantaImage Sensor (QIS). In some embodiments, the pixels may besub-diffraction limit pixels, which in some implementations may be jots.The image sensor may include an array of microlens elements, and, invarious alternative embodiments, one or more pixels in each kernel ofthe pixel array may include an overlying absorption color filter,although absorption color filters may not be required—and are notemployed—in some embodiments of a multi junction color image sensor.

It will be appreciated by those skilled in the art that the foregoingbrief description and the following description with respect to thedrawings are illustrative and explanatory of some embodiments of thepresent invention, and are neither representative nor inclusive of allsubject matter and embodiments within the scope of the presentinvention, nor intended to be restrictive or characterizing of thepresent invention or limiting of the advantages which can be achieved byembodiments of the present invention, nor intended to require that thepresent invention necessarily provide one or more of the advantagesdescribed herein with respect to some embodiments. Thus, theaccompanying drawings, referred to herein and constituting a parthereof, illustrate some embodiments of the invention, and, together withthe detailed description, serve to explain principles of someembodiments of the invention.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects, features, and advantages of embodiments of the invention, bothas to structure and operation, will be understood and will become morereadily apparent when the invention is considered in the light of thefollowing description made in conjunction with the accompanyingdrawings, in which like reference numerals designate the same or similarparts throughout the various figures, and wherein:

FIGS. 1-4 each schematically depicts a kernel of a color image sensor,in accordance with respective illustrative embodiment;

FIG. 5 is a simulation of the transmittances of two sample DBRsconsisting of quarter wavelength films of silicon oxide (SiO2) andsilicon nitride (Si3N4) and designed for center wavelengths of 450 and650 nm, in accordance with some embodiments of the present invention;

FIGS. 6A and 6B depict normalized spectral responses of two 2-layerpixels with two different DBRs designed for reflection at 450 nm and 650nm, in accordance with some embodiments of the present invention;

FIG. 4 depicts a top plan view of a portion of an illustrative colorfilter array pattern based on a Bayer pattern, in accordance with someembodiments of the present invention;

FIG. 5 depicts an illustrative alternative implementation of the colorfilter array pattern of FIG. 3, in accordance with some embodiments ofthe present invention;

FIG. 6 depicts an illustrative embodiment corresponding to the colorfilter array of FIG. 5 transformed such that adjacent color filterelements having the same color are implemented as a continuous colorfilter region, in accordance with some embodiments of the presentinvention;

FIG. 7 depicts a cross-sectional view of two neighboring 2-layer pixelsin accordance with an illustrative embodiment employing wafer bonding,in accordance with some embodiments of the present invention;

FIG. 8 depicts the result of a simulation evaluating the performance ofan iteration of an illustrative embodiment in which no NIR filters areused, in accordance with some embodiments of the present invention.

DETAILED DESCRIPTION OF SOME EMBODIMENTS

Throughout the description and claims, the following terms take at leastthe meanings explicitly associated herein, unless the context dictatesotherwise. The meanings identified below do not necessarily limit theterms, but merely provide illustrative examples for the terms.

The phrase “an embodiment” as used herein does not necessarily refer tothe same embodiment, though it may. Similarly, the phrase “someembodiments” as used herein at different instances does not necessarilyrefer to the same “some embodiments,” though it may. In addition, themeaning of “a,” “an,” and “the” include plural references; thus, forexample, “an embodiment” is not limited to a single embodiment butrefers to one or more embodiments. Similarly, the phrase “oneembodiment” does not necessarily refer the same embodiment and is notlimited to a single embodiment. As used herein, the term “or” is aninclusive “or” operator, and is equivalent to the term “and/or,” unlessthe context clearly dictates otherwise. The term “based on” is notexclusive and allows for being based on additional factors notdescribed, unless the context clearly dictates otherwise.

The terms “color filter,” “color filter element,” or similar terms, areused herein in accordance with their ordinary and customary meaning tothose skilled in the art, in accordance with the context in which theseterms are used. For example, a conventional color filter, conventionalCFA, or absorption color filter, or similar terms in context, may beunderstood to refer to, for example, a component (e.g., a materiallayer) that selectively transmits light within a certain range ofwavelengths (e.g., corresponding to a portion of the color spectrum),the color filter thus having a wavelength-dependent transmissioncharacteristic such that it transmits light within the certain range ofwavelengths (sometimes referred to as the “passband”), whilesubstantially absorbing light having wavelengths (or color) outside ofthe passband.

For clarity, it is noted that the term “kernel” (or similarly, “unitkernel”), as used herein, refers to a minimal repeating pattern ofpixels comprising at least one multi junction pixel (and associated atleast one FDR) that is two-dimensionally replicated over the full extentof the color filter array.

As used herein, with respect to the image plane (e.g., corresponding toa plan view of an image sensor), two pixel elements (e.g., multilayerpixel elements) are “adjacent” or “neighboring” if they are disposednear each other without any intervening pixels. In addition, as usedherein with respect to the image plane (e.g., corresponding to a planview of an image sensor), the term “nearest neighbor” with respect toany given pixel in a pixel array refers to an adjacent pixel having aminimum distance to the given pixels as may be measured along a linebetween corresponding points on the adjacent and given pixels, inaccordance with the ordinary and customary meaning of “nearest neighbor”in the context of arrays, as understood by those skilled in the art.Similarly, as used herein with respect to the image plane (e.g.,corresponding to a plan view of an image sensor), the term“next-nearest-neighbor” with respect to any given pixel in a pixel arrayrefers to an adjacent pixel having the next-shortest distance (greaterthan the minimum distance) to the given pixel as may be measured along aline between corresponding points on the adjacent and given pixels, inaccordance with the ordinary and customary meaning of“next-nearest-neighbor” in the context of arrays, as understood by thoseskilled in the art. It may be understood, for example, that a givenpixel may have more than one nearest neighbor as well as more than onenext-nearest-neighbor.

Further, as used herein with respect to the image plane (e.g.,corresponding to a plan view of an image sensor), it will be understoodthat for ease of reference and clarity of exposition with respect to aregular, rectangular (e.g., square) array, having elements arranged in arow/column configuration, the terms “vertical” and “horizontal” will beused herein to refer to orthogonal directions between nearest neighborcolor elements, whereas “diagonal” will be used herein to refer to thedirection between next-nearest-neighbor color elements. While theseterms may reflect the perspective of the referenced figures on the pageand/or conventional reference to image sensor pixel arrays with respectto readout circuitry, it is understood that no preferred orientation isimplied by such nomenclature; e.g., “row” and “column” designations areinterchangeable, as are “horizontal” and “vertical” designations.

Similarly, it will be understood that simply for ease of reference andclarity of exposition with respect to a multi-layer pixel, terms such as“upper,” “top,” “lower,” and “bottom,” with reference to a layer,junction or other structure refers to a relative spatial position withrespect to a primary direction along which that the image sensor isconfigured to have incident light impinge thereon for image sensing,wherein “upper” and/or “top” refers to a position disposed closer to thesource of the incident illumination than a position referred to by“lower” and/or “bottom.” As such, light incident on the image sensorwill impinge on a “top” or “upper” junction/layer before possibly (e.g.,if not absorbed by the top or upper junction/layer) impinging on a“lower” or “bottom” junction/layer. In this regard, it may also beunderstood, in context, that with respect to a given multi junctionpixel, a “top” or “upper” junction of the pixel overlies a “bottom” or“lower” junction along the light incidence direction. It will beunderstood, however, that such terms may not have a relation to termssuch as “frontside” or “backside” with respect to the surface of theimage sensor's wafer/substrate that is configured to be illuminated. Forinstance, a multi junction image sensor may comprise a “top” junctionand a “bottom” junction, wherein the “top” junction is formed in awafer/substrate that is backside-illuminated. It is understood,therefore, as noted, that the “top,” “upper,” “bottom,” “lower”terminology as used herein is a convention simply for convenience andease of reference with respect to referring to different layers, anddoes not otherwise impart any limitation on the overall design and/ororientation of a multi-layer color image sensor in accordance with thepresent disclosure. Also, for ease of reference, as used herein withrespect to overlying (e.g., stacked) pixels or junctions of a multilayerpixel, two such pixels or junctions may be referred to as being“adjacent” if they do not include an intervening junction or pixelcorresponding to the multilayer pixel.

The term “substrate” is to be understood as a semiconductor-basedmaterial such as silicon, silicon-on-insulator (SOI) orsilicon-on-sapphire (SOS) technology, doped and undoped semiconductors,epitaxial layers of silicon supported by a base semiconductorfoundation, and other semiconductor structures. In addition, thesemiconductor need not be silicon-based, but may be based on, forexample, silicon-germanium, germanium, or gallium arsenide.

In addition, as will be understood by those skilled in the art in viewof the ensuing disclosure, because each multi junction pixel comprisesat least two junctions from which separate color sample signals may beaccumulated and readout of the image sensor, each multi-junction pixelmay be referred to as having more than one pixel, regardless of whethershared readout is employed among the pixels of a given multi junctionpixel. For example, a two-layer pixel having two junctions (e.g., anupper junction and lower junction) may be referred to as having an upperpixel and lower pixel, regardless of whether the upper and lower pixelhave entirely independent readout circuitry (e.g., transfer gate, resetgate, floating diffusion region, source-follower amplifier, androw-select transistor) or readout circuitry (e.g., floating diffusion,and/or reset gate, etc.).

Referring now to FIGS. 1-4, shown in each of these figures is aschematic block representation of a respective illustrative image sensorkernel 10 comprising multi-layer pixels 12, 14, 16, and 18, wherein thekernel 10 incorporates at least one FDR for varying the color responseof the upper and lower pixels of at least one multilayer pixel, inaccordance with some embodiments. In these illustrative embodiments,each kernel 10 comprises four two-layer pixels, wherein the two-layerpixels are arranged in a 2×2 array.

More specifically, for clarity of exposition, FIGS. 1a-c schematicallyrepresent an image sensor kernel in a hybrid plan-view andcross-sectional view: multi-layer pixels 12, 14, 16, and 18 are depictedrelative to each other in a plan view of the kernel; and eachmulti-layer pixel 12, 14, 16, and 18 are schematically depicted incross-sectional view to show respective upper layers 12 t, 14 t, 16 t,18 t, respective lower layers 12 b, 14 b, 16 b, 18 b, and interveninglayers, which may comprise an FDR (e.g., shown as DBRs DBR1, DBR2, DBR3,and DBR4), or a uniform dielectric layer (e.g., oxide 13). In FIGS. 1-4,color samples associated with photoconversion in upper and lower layersare identified by references S1, S2, S3, S4, S5, S6, S7, and S8, whereindifferent pixels of a given kernel that are configured to provide thesame color sample are denoted by identical color sample referencecharacters, and wherein different pixels of a given kernel that areconfigured to provide different color samples are denoted by differentcolor sample reference characters. Similarly, it will be understood thatlike referenced DBRs and oxide layers indicate common layers havingcommon properties (e.g., reflectivity, transmittance, etc.) with respectto providing color samples in the respective adjacent upper and lowerpixels.

Accordingly, in some embodiments such as schematically depicted in FIGS.1-4, an FDR is included between the top and bottom junctions of at leastone pixel in a kernel of the image sensors array so as to vary thespectral sensitivity without using color filter arrays. In such a pixel,a portion of the visible light spectrum is reflected, thus making twopasses through the top layer (e.g., layers 12 t, 14 t, 16 t, 18 t) andincreasing its absorption in that layer. Consequently, the absorption ofthat part of the spectrum in the bottom layer (e.g., 12 b, 14 b, 16 b,18 b) is decreased. This configuration incorporating an intervening FDRmodifies (e.g., compared to not using an intervening FDR) the responsesof the two (upper and lower) junctions, thus producing different colorsamples than the original two layer pixels.

It will thus be understood that in FIG. 1, two two-layer pixels 12 and18 have a common DBR stack DBR1 between their top and bottom junctionswhile the other two two-layer pixels 14 and 16 have an intervening oxide13 (e.g., or, in some embodiments, some other insulating dielectric)between upper and lower junctions. Accordingly, four different spectral(color) samples S1, S2, S3, and S4 are produced by such a kernel.

In FIG. 2, the four two-layer pixel kernel has (i) two two-layer pixels12 and 18 that incorporate a common DBR layer DBR1 having a maximumreflectance at a first wavelength (e.g., 500 nm), and (ii) two-layerpixels 14 and 16 that incorporate another DBR layer DBR2 having amaximum reflectance at a different wavelength (e.g., 650 nm). Like thekernel of FIG. 1, this configuration similarly produces four colorsamples S1, S2, S3, and S4 (which, as will be understood, are notnecessarily the same color samples as in the kernel of FIG. 1).

In some embodiments, more than 2 different DBRs can be incorporated in akernel to increase the number of color samples. For example, kernel 10of FIG. 3 includes three different DBRs, namely, DBR1, DBR2, DBR3, toprovide six color samples S1, S1, S3, S4, S5, and S6. And in theillustrative embodiment of FIG. 4, the kernel 10 includes four differentDBRs, namely, DBR1, DBR2, DBR3, DBR4, to provide eight color samplesS1-S6, S7, and S8.

As will be understood in view of the present disclosure, each of someembodiments of the present invention allows for a number of parametersto be used to optimize color quality and SNR of the image sensor. Sincethe pixel response depends on the junction depth as well as thereflectance bandwidth, maximum reflectance, and wavelength of maximumreflectance of the reflector, these parameters can be used asoptimization variables to improve SNR and color quality.

In some embodiments, a DBR may be used as a wavelength dependentreflector, such as described above. For example, the DBR may comprisealternating quarter wavelength films of high and low refractive indexmaterial. High reflectivity is obtained by constructive interference ofelectromagnetic waves reflected at interfaces between repeating layersof high and low refractive index materials. As will be understood bythose skilled in the art, all interfaces preferably should be parallelfor constructive interference, in accordance with some embodiments. Themaximum reflectance of a DBR stack is dependent on the refractive indexratio between the high and low index materials as well as the number oflayers in the stack. This maximum reflectance is given by

$R_{\max} = \left( \frac{1 - {\left( \frac{n_{f}}{n_{i}} \right)\left( \frac{n_{H}}{n_{L}} \right)^{2\; N}}}{1 - {\left( \frac{n_{f}}{n_{i}} \right)\left( \frac{n_{H}}{n_{L}} \right)^{2\; N}}} \right)^{2}$

where n_(i) and n_(f) are the refractive indices of the incident mediumfrom which the light arrives at the DBR and the substrate into whichtransmitted light from the DBR emerges respectively. n_(H) and n_(L) arethe high and low refractive indices respectively and N is the number oflayer pairs in the stack.

The width of the stop band of the DBR is also determined by therefractive index ratio of the two layers and is given by the followingrelation:

${\Delta\lambda} = {\frac{4}{\pi}{{\sin^{- 1}\left( \frac{n_{H} - n_{L}}{n_{H} + n_{L}} \right)} \cdot \lambda_{o}}}$

where λ_(o) is the center wavelength. Shown in FIG. 5 is a simulation ofthe transmittances of two sample DBRs consisting of quarter wavelengthfilms of silicon oxide (SiO₂) and silicon nitride (Si₃N₄) and designedfor center wavelengths of 450 and 650 nm.

Shown, by way of example, in FIGS. 6A and 6B are the normalized spectralresponses of two 2-layer pixels with two different DBRs designed forreflection at 450 nm and 650 nm. D65 illuminant was used in thissimulation and the spectral response displayed is for the white colorpatch in the Macbeth color chart. Significantly different spectralresponses are obtained for the top (L1) and bottom (L2) layers in eachpixel. Also observe the spectral response for the L1 layers in the700-1000 nm range is extremely small as a result of the largepenetration depth of NIR light.

In some embodiments according to the present disclosure, similarfrequency dependent reflectors/transmitters can be used in place of aDBR. Among these, for example, dielectric single and multiple cavityfabry-perot filters may be used. In fact, in accordance with someembodiments, by replacing the high or low refractive index layers atcertain locations within a DBR stack, a “cavity” can be createdeffectively turning the DBR into a fabry-perot filter.

Implementing color image sensors in accordance with the presentdisclosure, such as in accordance with the foregoing illustrativeembodiments, produces three or more color channel outputs, withoutrequiring conventional color filters, in accordance with someembodiments. Since the color channel response will be significantlydifferent from the standard color matching functions, implementationswith greater than three color channel outputs typically will be moreadvantageous. Color reproduction errors after color correction depend onboth the quality of basis functions (spectral sensitivity of channels)and the number of color channels. Increasing the number of channels orreducing the spectral overlap between the different channels or acombination of the two reduces the color reproduction error. The colorquality specifications of the image sensor may therefore be met byoptimizing the different design parameters including pixel junctiondepth and properties of the frequency dependent reflector.

In some embodiments, two layer pixels may be implemented on a singlewafer by implanting junctions at different depths. This may requiredeeply implanted junctions which may use non-standard processes.Alternatively, in some embodiments, the bottom junction may be implantedfirst, and then an epitaxial layer can be grown over it for theimplantation of the top junction. One drawback with this approach isthat transfer of charge from the bottom junction may be very difficult,requiring large voltages. The signal red from these bottom junctionswill be plagued by high KTC noise.

As an illustrative alternative to these methods, wafer bonding may beused such that the two different junctions are implanted on separatewafers, as for example disclosed in U.S. Patent Application PublicationNo. US2015/0090863 to Manoorian, et al., the contents of which arehereby incorporated by reference in its entirety. In some embodiments,the two different junctions may be implanted on the separate waferscomplete with their respective read out chains, though someimplementations may employ shared readout circuitry between pixelsformed on the different wafers. The two wafers are then bonded such thatone junction is directly located on top of the other. In someimplementations, the reflector stack, may be located on either wafer.Backside illumination technique could be used on the top junction pixelto enhance performance. In such an implementation it would be preferableto deposit the reflector stack before the metallization layers to ensureminimal loss of reflected light as shown in the illustrative embodimentschematically structure depicted in FIG. 7.

More particularly, the illustrative embodiment of FIG. 7 depicts across-sectional view of two neighboring 2-layer pixels in accordancewith an illustrative embodiment employing wafer bonding. As shown, a toppixel layer 101 (corresponding to a first wafer with substrate 105,which may be thinned for backside illumination by light incident on theimage sensor) comprises DBRs 112 and 114 in respective upper pixels 101a and 101 b, and a bottom pixel layer 103 (corresponding to a secondwafer with substrate 107) comprises underlying lower pixels 103 a and103 b. Each pixel is shown as including a photodiode PD having a pinningdopant layer 113, a transfer gate TX, a floating diffusion FD, a resetgate RG, and a reset drain RD. Upper and lower pixel layers also includeinterconnect layers 122 that include conductive metallization (e.g.,metal layers) and interlayer dielectrics. Also shown, by way of example,is a light shielding elements 117 that may be included to prevent orreduce optical cross-talk. As schematically illustrated, the two wafersare bonded at their front surfaces along wafer bonding plane 111, andconfigured to provide light pipes 109 to guide light from the upperphotodiode to the lower photodiode. As will be understood by thoseskilled in the art, a further dielectric layer (e.g., which may compriseone or more layers) may be disposed on substrate 105 and is formed intoan array of microlenses corresponding on a one microlens to onemultilayer pixel (or, in some embodiments a one-to-many) basis with themultilayer pixels.

As will be understood in view of the present disclosure, FIG. 7 depictsa portion of an of image sensor, which may further include additionalcircuitry (not shown) outside the pixel array, such as row and columntiming and driver circuitry, column sense amplifiers, and A/Dconverters, monolithically integrated (i.e., on the same chip) as partof image sensor. Also, as known to those skilled in the art, each pixelincludes associated pixel circuitry, which may be configured in variousways (e.g., 4 T pixel, shared-readout circuitry, etc.) and may alsoinclude, for example, an amplifier (e.g., source-follower transistor),and a readout transistor.

And further, as noted, for purposes of clarity of exposition, FIG. 7illustrates a cross-sectional portion of only two neighboring two-layerpixels of the pixel array portion of an image sensor, the illustrativecross section being along a vertical or horizontal direction of a pixelarray and intersecting the photosensitive regions of the pixels.

It will also be understood, for example, that while FIG. 7 depicts antop pixel layer back-side illumination (BSI) configuration and a bottompixel layer front-side illumination configuration, embodiments inaccordance with the present disclosure are not limited as such, and mayinclude any variation of FSI and BSI configured top and bottomwafers/layers.

In some embodiments of the present invention, at least one channel ineach kernel can be designed to capture NIR light to improve sensitivityof the detector and hence its low light performance. Infra-red cut-offfilters may be used to improve the color reproduction. Typically, theseare used to reduce the corruption of the color signals by infraredlight. An illustrative compromise between improving low lightperformance and maintaining good color reproduction is to capture NIRlight only in some pixels in the kernel. Instead of having a NIR filterover all pixels in a kernel, some pixels can be left exposed to NIRlight. This will increase signal collected in low light situations thusenhancing the signal-to-noise ratio. Shown in FIG. 8 is the result of asimulation evaluating the performance of an iteration of an illustrativeimplementation of the current invention in which no NIR filters wereused. All channels admit NIR light. Simulations determined optimal colorcorrection matrices for the best color and YSNR performance. In thefigure shown below, the YSNR—Color Error relationship of our samplestructure is compared to that of a conventional two layer pixel withGreen and Magenta color filters.

It is evident that using the color filters produces the best colorperformance. Note, however, that when a sufficiently high color error isallowed, the two layer DBR pixels allowing NIR light have significantlyhigher YSNR than the conventional two layer pixels using absorptioncolor filters.

The implementation of frequency dependent reflectors requires a fewextra deposition steps which may increase costs. Color performance ofsome implementations of such an imager may also be worse than colorreproduction obtained by using absorption color filters as is currentlydone because of the non-optimal color responses. However, each ofvarious embodiments of the present invention enhances light collectionand could greatly improve low light performance. In applications wherecolor performance can be traded for YSNR improvement such as in securityapplications, this approach is an excellent alternative to theconventional methods.

It will be understood, for example, that kernels in accordance with thepresent disclosure are not limited to square multi-layer pixel arrays.In other words, in view of the present disclosure one skilled in the artwill understand that multi-layer pixels having a FDR in accordance withthe present disclosure are applicable to myriad image sensors and imagesensor pixel configurations, and are not limited to or by the imagesensor and pixel circuit configurations generally described herein forpurposes of ease of reference and clarity of exposition.

Some aspects of the present invention have been illustrated anddescribed with respect to specific embodiments thereof, whichembodiments are merely illustrative of the principles of the inventionand are not intended to be exclusive or otherwise limiting embodiments.Accordingly, although the above description of illustrative embodimentsof the present invention, as well as various illustrative modificationsand features thereof, provides many specificities, these enablingdetails should not be construed as limiting the scope of the invention,and it will be readily understood by those persons skilled in the artthat the present invention is susceptible to many modifications,adaptations, variations, omissions, additions, and equivalentimplementations without departing from this scope and withoutdiminishing its attendant advantages. For instance, except to the extentnecessary or inherent in the processes themselves, no particular orderto steps or stages of methods or processes described in this disclosure,including the figures, is implied. In many cases the order of processsteps may be varied, and various illustrative steps may be combined,altered, or omitted, without changing the purpose, effect or import ofthe methods described. It is further noted that the terms andexpressions have been used as terms of description and not terms oflimitation. There is no intention to use the terms or expressions toexclude any equivalents of features shown and described or portionsthereof. Additionally, the present invention may be practiced withoutnecessarily providing one or more of the advantages described herein orotherwise understood in view of the disclosure and/or that may berealized in some embodiments thereof. It is therefore intended that thepresent invention is not limited to the disclosed embodiments but shouldbe defined in accordance with the claims that follow.

What is claimed is:
 1. A color image sensor that comprises a pluralityof multi-layer pixels, the color filter array comprising: a plurality ofkernels, each kernel comprising an identical configuration ofmulti-layer pixels; and wherein at least on multi-layer pixel in eachkernel includes a dielectric frequency-dependent reflector disposedbetween and adjacent to an upper photoconversion layer and a lowerphotoconversion layer.
 2. The color image sensor of claim 1, wherein atleast two of the multi-layer pixels in the kernel have respectivedielectric frequency-dependent reflectors having different respectivereflectance characteristics.
 3. The color image sensor of claim 1,wherein at least two of the multi-layer pixels in the kernel haverespective dielectric frequency-dependent reflectors havingsubstantially the same reflectance characteristics.
 4. The color imagesensor of claim 1, wherein at least three of the multi-layer pixels inthe kernel have respective dielectric frequency-dependent reflectorshaving different respective reflectance characteristics.
 5. The colorimage sensor of claim 1, wherein at least four of the multi-layer pixelsin the kernel have respective dielectric frequency-dependent reflectorshaving different respective reflectance characteristics.
 6. The colorimage sensor according to claim 1, wherein NIR filters are configuredover some bit not all of the pixels in the kernel to enhance colorreproduction.
 7. The color image sensor according to claim 1, wherein atleast one NIR filter is configured over all of the pixels in the kernelto enhance color reproduction.
 8. The color image sensor according toclaim 1, wherein at least one channel corresponding to a multi-layerpixel collects NIR light for enhanced sensitivity
 9. The color imagesensor according to claim 1, wherein each multi-layer pixel comprises anupper junction and a lower junction, and each upper junction is formedon a first wafer, each lower junction is formed on a second wafer, andwherein the first and second wafers are bonded to provide the colorimage sensor.
 10. The color image sensor according to claim 1, whereinboth junctions are realized on the same wafer such that a first junctionis implanted and an epitaxial layer grown for the implantation of asecond junction.
 11. The color image sensor according to claim 1,wherein the color image sensor is a CMOS active pixel image sensor. 12.The color image sensor of claim 1, each multi-layer pixel is a two-layerpixel.